Kofloc Low-cost Mass Flow Sensor MODEL 3810S SERIES

Low-cost
Mass Flow Sensor
MODEL
3810S SERIES



Designed
on the heritage base construction of the superior class bypass capillary type
mass flow sensor, the Model 3810S Mass Flow Sensor centers the focus on economy
through a thorough effort towards streamlining with the view to built-in
applications. The series is one of the KOFLOC best sellers and is used by many
assembly manufacturers as a substitute for the existing float type (tapered
pipe type) flow meter.
Features
-A low-cost, still, full-fledged sensor
based on a combination of the constant-current temperature difference detection
type with the bypass capillary type
-A large cost reduction makes Model
3810S almost rival any ex-isting float type flow meter in price.
-0 to 5VDC analog flow outputs provide
various applications such as measurements recording, control and alarm
issuance.
-The sensor is mass flow type. The user
needs no troublesome calculations for flow correction due to the effects of
tempera-ture and pressure. 
Standard
Specifications
– Flow range (N2 equivalent, 20/1 atm) :
  *10 SCCM–2 SLM (freely selectable)
  *3 SLM–50 SLM (freely
selectable)
– Sensor : Thermal mass flow sensor
– Accuracy :
  *±2%F.S. (25)
  *±5%F.S. (25)
– Temperature coefficient :
  *±0.15 F.S./ (15–35)
  *±0.2 F.S./ (15–35)
– Repeatability : ±0.5%F.S.
– Proof pressure : 980 kPa (G)
– Allowable ambient temperature : 5–45
– Allowable ambient
humidity : 10–90% (No condensation allowed)
– Materials of parts in contact with gases
:
 * Body: SUS303, PTFE
 * Sealing: FKM (option: CR or NBR)
– Electric connection : 171826-5 (made by
AMP)
– Flow output signal : 0–5 VDC (External
load resistance: 250 kΩ or more)
– Power supply : ±15 VDC ±5%, 60 mA
– Joint (Main unit bore) : Rc1/4
– Weight :
  * Approx. 250 g
  * Approx. 350 g
Dimensions
!!NOTE!!
Specifications relating to the flow range (e.g., flow range, accuracy and
response) are expressed in N2 or air equivalent. The product will be built with
the primary pressure of 300 kPa or less and the secondary side open to the
atmosphere. For details on the pressure requirements, please contact us. 
Note :  The series 3810 pin
assigment has been modified from march 2000, and ia not compatible with the old
model. Please chec the following :
AMP171826-5 On The Connector 3810 side
Amp171822-5 on cable side

Kofloc High Grade Mass Flow Meter 3100 Series

High-grade Mass Flow Meter
MODEL 3100 SERIES



The Model
3100 Series Mass Flow Meter is a new, ad-vanced high-precision flowmeter
developed based on the Model 3200 Series. The incorporated innovative
capillary type flow sensor reduces pressure loss and ensures high
response as well as ensuring stability.



Features :
• Equipped
with a temperature follow-up type current difference detection flow
sensor to ensure high accuracy and quick response.
• Measurements of minute flows available up to 1 SCCM full scale (SR option).

Standard Spesifications:

1. Flow range (at N2 calibration conditions) : 10SCCM-20SLM

2. Response : 1 sec. or less to within ±2% of full scale of  final value typical for 0-100% response

3. Accuracy : Within ±1.0% F.S./3100

4. Linearity : Within ±0.5% F.S.

5. Repeatability : Within ±0.2% F.S.

6. Proof pressure : 980kPa

7. Leak rate : 1×10-8 Pa•m3/s or less (excluding transmission of He)

8. Working temperature range : 0-50℃ (Accuracy guarantee: 15-35℃)

9. Materials of parts exposed to gases :

    – Body : SUS 316L, SUS 316, PTFE

    – Seals : Viton® (Optional: Neoprene®)

10. Joint :

     – Standard : 1/4SWL®

     – Optional: 1/8SWL® 1/4VCR® RC1/4®, etc.

11. Electrical connections : Dsub 9-pin male connector per KFC standard (SEMI standard)

12. Flow rate output signals : 0-5VDC

13. Required power supply* : +15VDC (±5%) 100mA, –15VDC (±5%) 100mA

Kofloc High-Grade Mass Flow Controller Model 3200 Series

High-grade Mass Flow Controller  MODEL 3200 SERIES
Model
3200 Series Mass Flow Controller is an advanced model designed as a
successor of the 3910 Series that enjoys a wide use for diverse
applications such as manu-facture of semiconductors, LCDs, combustion
equipment, analytical devices, and biotechnology fields. Its high
per-formance is equal to a new standard of KOFLOC.                 
Features
Equipped
with a temperature follow-up type current difference detection flow
sensor (patent applied for) to ensure high accu-racy and high-speed
response

Use of a normally closed valve to ensure safety
Reduced dead volume thanks to the diaphragm seat valve
Control of small quantities of flows available up to 1 SCCM fullscale (SR option)
Low differential pressure type control available for combustiblegases (LP option)
Standard Specifications
– Flow range (N2 equivalent, 20℃/1 atm) : 1 SCCM–20 SLM (The conditions are freely selectable)
– Sensor : Thermal mass flow sensor
– Valve type : Proportional solenoid valve (closed when not energized)
– Control range : 2–100% (F.S.)
– Response : 1 sec. or less (0–100% within ±2% typical)
– Accuracy : ±1% F.S. (Accuracy guaranteed at 15–35℃)
– Repeatability : ±0.2%F.S.
– Operating differential pressure : * F.S. ≤ 5 SLM: 50–300 kPa (G)
                                                       *F.S.> 5 SLM: 100–300 kPa (G)
 
                                                 Option: Low
differential pressure (LP) specification is avaible   depending on conditions.
– Allowable operating pressure : 300 kPa (G) or less
– Proof pressure : 980 kPa (G)
– Leak rate : 1 × 10-8 Pa•m3/s or less (excluding permeation of He)
– Allowable ambient temperature : 0–50℃
– Allowable ambient humidity : 10–90% (No condensation allowed)
– Materials of parts in contact with gases : * Body: SUS316L
                                                                *Diaphragm: SUS316
                                                                *Valve seat: FKM (option: CR, NBR or perfluor)
                                                                *Sealing: FKM (option: CR, NBR or perfluor)
– Electric connection : Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
– Flow rate input signals : 0–5 VDC (Input impedance: 1 MΩ or more)
– Flow rate output signals : 0–5 VDC (External load resistance: 250 kΩ or more)
– Required power supply : +15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA
– Joint (Main unit bore) : Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc.
– Weight : Approx. 1000 g
!!Note !!
Specifications
relating to the flow range (e.g., flow range, accuracy and re-sponse)
are expressed in N2 or air equivalent. The product will be built with
the primary pressure of 300 kPa or less and the secondary side open to
the atmosphere. For details on the pressure requirements, please contact
us.