3760 SERIES

Standard Mass Flow Meter
MODEL 3760 SERIES

The Model 3760 Series is a compact, low-cost mass flow meter developed based on the Model 3660 Series. It has been developed as a standard model of various analyzers and vacuum equipment for research and development at universities and research institutes.

Features :

• Improved constant-current temperature difference detection type flow sensor for quick response
• The compact body permits installation at any location.

Standard Spesifications:

1. Flow range (N2 equivalent, 20℃/1atm)

3760 : 10 SCCM–20 SLM (freely selectable)

3765 : 30 SLM–100 SLM (freely selectable)

2. Sensor : Thermal mass flow sensor

3. Response

3760 : 2 sec. or less

3765 : 3 sec. or less

4. Accuracy

3760 : ±1.0%F.S. (25℃)

3765 : ±1.5%F.S. (25℃)

5. Temperature coefficient

3760 : ±0.1 F.S./℃ (15–35℃)

3765 : ±0.2 F.S./℃ (15–35℃)

6. Repeatability : ±0.5%F.S. (20℃)

7. Proof pressure : 980kPa (G)

8. Leak rate : 1 × 10-8 Pa•m3/s or less (excluding permeation of He)

9. Allowable ambient temperature : 5–45℃

10. Allowable ambient humidity : 10–90% (No condensation allowed)

11. Materials of parts in contact with gases : Body: SUS316

Sealing: FKM (option: CR or NBR)

12. Electric connection : Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)

13. Flow rate output signals : 0–5 VDC (External load resistance: 250 kΩ or more)

14. Required power supply : +15VDC (±5%) 100mA, −15VDC (±5%)100mA

15. Joint (Main unit bore)

3760 : Standard: 1/4SWL

Option: 1/8SWL 1/4VCR RC1/4, etc.

3765 : Standard: 3/8SWL

Option: 1/2SWL 3/8VCR RC3/8, etc.

16. Weight

3760 : Approx. 800 g

3765 : Approx. 1000 g

!!Note!!
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.