Kofloc Low-Cost Metal Sealed Mass Flow Controller /Meter Model 5400

The
Model 5400 Series is a successor to the Model 3440, with enhanced basic
capabilities. The appearance is similar to the conventional MFC. The
sensor drive system is improved : the zero-drift is further  reduced and
the response in the lower range is improved . The Model 5410 Series is a
mass flow meter with the same body design as that of the 5400 series.

Features :

• Control and response in each setting range are improved.
• The following capability to the set voltage is improved (supporting ramping specifications).
• As the valve is improved, the control resolution in each range is improved.

Standard Spesifications :

1. Flow range (N2 equivalent,20℃/1 atm) 

5400  : 10 SCCM–20 SLM (freely selectable)

5410 :  10 SCCM–20SLM(freely selectable)

2. Sensor

5400  : Thermal mass flow sensor

3. Valve type 

5400  : Proportional solenoid valve (closed when not energized)    5410 :  –

4. Control range 

5400  : 2–100% (F.S.)                                                              5410 :  –

5. Response 

5400  : 1 sec. or less (0–100% within ±2% typical)                              5410 :  –

6. Accuracy 

5400  : ±1% F.S. (20℃)

7. Repeatability : Within ±0.2% F.S. (20℃)

8. Operating differential  pressure 

5400  : F.S. ≤ 5 SLM: 50–300 kPa                                              5410 :  –

         F.S.> 5 SLM: 100–300 kPa                                             –

9. Allowable operating pressure

5400  : 300 kPa (G) or less

10. Proof pressure : 980 kPa (G)

11. Leak rate : 1 × 10-11 Pa•m3/s or less

12. Allowable ambient temperature  :  0–50℃ (Accuracy guaranteed at 15–35℃,  ±0.1% F.S./℃)

13. Allowable ambient humidity :   10–90% (No condensation allowed)

14. Materials of parts in  contact with gases :  

– Body: SUS316L

– Diaphragm: Ni-Co

– Valve seat: PTFE

– Sealing: SUS316L, Ni

15. Electric connection :

Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)

16. Flow rate input signals   :

5400  :  0–5 VDC (Input impedance: 1 MΩ or more)　 5410 :  –

17. Flow rate output signals :  0–5 VDC (Minimum load resistance: 250 kΩ or more)                                                                        

18. Required power supply :

5400  :  +15 VDC (±5%) 100 mA,                     5410 :  +15 VDC (±5%) 100 mA,

              −15VDC (±5%) 200mA                                    −15VDC (±5%) 100mA

19. Joint (Main unit bore) : Standard: 1/4 VCR equivalent Option: 1/4 SWL

20. Weight 

5400  :   Approx. 1000 g                                         5410 :  Approx. 800 g

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